Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators
نویسندگان
چکیده
منابع مشابه
CORRIGENDUM: Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators
Micromechanical resonators are promising replacements for quartz crystals for timing and frequency references owing to potential for compactness, integrability with CMOS fabrication processes, low cost, and low power consumption. To be used in high performance reference application, resonators should obtain a high quality factor. The limit of the quality factor achieved by a resonator is set by...
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ژورنال
عنوان ژورنال: Scientific Reports
سال: 2013
ISSN: 2045-2322
DOI: 10.1038/srep03244